Mechanics of Microelectromechanical Systems

Mechanics of Microelectromechanical Systems, 9781402080135 (1402080131), Springer, 2004

This book offers a comprehensive coverage to the mechanics of
microelectromechanical systems (MEMS), which are analyzed from a
mechanical engineer’s viewpoint as devices that transform an input form of
energy, such as thermal, electrostatic, electromagnetic or optical, into output
mechanical motion (in the case of actuation) or that can operate with the
reversed functionality (as in sensors) and convert an external stimulus, such as
mechanical motion, into (generally) electric energy. The impetus of this
proposal stems from the perception that such an approach might contribute to
a more solid understanding of the principles governing the mechanics of
MEMS, and would hopefully enhance the efficiency of modeling and
designing reliable and desirably-optimized microsystems. The work
represents an attempt at both extending and deepening the mechanical-based
approach to MEMS in the static domain by providing simple, yet reliable
tools that are applicable to micromechanism design through current
fabrication technologies.

Lumped-parameter stiffness and compliance properties of flexible
components are derived both analytically (as closed-form solutions) and as
simplified (engineering) formulas. Also studied are the principal means of
actuation/sensing and their integration into the overall microsystem. Various
examples of MEMS are studied in order to better illustrate the presentation of
the different modeling principles and algorithms.

Comments

Amazing Books

Estate Regeneration and Its Discontents: Public Housing, Place and Inequality in London

Policy Press, 2021

Using original interviews with estate residents in London, Watt provides a vivid account of estate regeneration and its impacts on marginalised communities in London, showing their experiences and perspectives. He demonstrates the dramatic impacts that regeneration and gentrification can have on socio-spatial inequality....

IT Essentials: PC Hardware and Software Labs and Study Guide (3rd Edition) (Lab Companion)

Cisco Press, 2008

The IT Essentials: PC Hardware and Software version 4 course in the Cisco® Networking Academy® is designed to prepare you to take and pass the CompTIA A+ exams based on the 2006 objectives. You must pass both the A+ Essentials and one of the technician exams to earn the A+ certification. Chapters 1 through 10 cover the foundational...

Sales and Distribution in SAP ERP: Practical Guide

SAS Institute, 2010

In today's competitive environment, the ability to handle business processes cost- effectively is critical. Sales and Distribution in SAP ERP (which, in this book, we'll refer to as SD) offers such a set of tools. As one of the most important and most often implemented SAP logistics functionalities, SD makes information...

Unicode Explained

O'Reilly, 2006

Fundamentally, computers just deal with numbers. They store letters and other characters by assigning a number for each one. There are hundreds of different encoding systems for mapping characters to numbers, but Unicode promises a single mapping. Unicode enables a single software product or website to be targeted across multiple...

Microsoft Access Version 2002 Core Reference

Microsoft Press, 2001

With MICROSOFT ACCESS Version 2002 CORE REFERENCE, developers learn how to quickly connect to structured data sources-and extend their solutions to the Web-with code and instruction, straight from the source. Highly regarded programming author Rick Dobson takes readers inside the enhanced capabilities of Access Version 2002, providing the expert...

Economic Miracles in the European Economies

Springer, 2019

This book undertakes a theoretical and econometric analysis of intense economic growth in selected European countries during the end of the twentieth century and the beginning of the twenty first. Focusing on the accelerated economic growth that occurred in Ireland, the Netherlands, Spain, and Turkey, this book investigates the...