Handbook of Chemical Vapor Deposition, 2nd Edition, Second Edition: Principles, Technology and Applications

Handbook of Chemical Vapor Deposition, 2nd Edition, Second Edition: Principles, Technology and Applications, 9780815514329 (0815514328), William Andrew Publishing, 2000

Chemical vapor deposition (CVD) has grown very rapidly in the last twenty years and applications of this fabrication process are now key elements in many industrial products, such as semiconductors, optoelectronics, optics, cutting tools, refractory fibers, filters and many others. CVD is no longer a laboratory curiosity but a major technology on par with other major technological disciplines such as electrodeposition, powder metallurgy, or conventional ceramic processing.

Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

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