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MEMS-based Circuits and Systems for Wireless Communication (Integrated Circuits and Systems)

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Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passive RF filters, in particular for duplexers in RF transceiver front ends for cellular communications. Beyond their use in filters, micromachined resonators can also be used in conjunction with active devices in innovative circuits and architectures. Possible applications are active tunable RF front-end filters, frequency synthesizers for LO generation, or temperature-compensated MEMS resonators for frequency/time reference potentially replacing the long-time used quartz crystal. Furthermore, MEMS devices can advantageously be used in radios for further miniaturization and reduction of power consumption.

This book presents a broad overview of this technology going from the MEMS devices, mainly BAW and Si-MEMS resonators, to basic circuits such as oscillators and finally complete systems such as ultralow-power MEMS-based radios. The work is targeted at circuit and system designers. The fabrication process of the MEMS devices is only covered at a minimal level. The discussion of MEMS devices focuses on their properties and modeling, so they can be efficiently used in circuits. Circuit design specific to MEMS devices is discussed in depth. Traditional circuits cannot be used with high-Q resonators, and special techniques for oscillator and filter design are required. Finally, several examples of system architectures built around MEMS devices are described. It is particularly shown how these architectures can exploit the potential of the MEMS devices to reduce size and power consumption for applications such as wireless sensors where these parameters are critical.
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